CDA for Oil-Free Compressor Systems for Semiconductor and Electronic Product Manufacturing.
Oil-free air compressor with dryer and air filter to facilitate the use of air supply in the testing/packaging process stage.
Semiconductor and electronics factories and systems are quite technical. Compression Dryer Air (CDA) is an indispensable equipment in precision manufacturing. Micro pollution control has become a clean room management (Clean Dry Air / An important part of the Instrument Air), proper positive pressure maintenance can ensure stable product quality and compliance with standards.
Applications:
Many industrial processes require the use of a large amount of pure compressed air. The clean room is the core of the factory. In addition to controlling the indoor temperature and humidity, any dust or other pollutants must also be eliminated. Therefore, the CDA system is used in industrial equipment factories. Indispensable, provide semiconductor, optoelectronics, electronics, panel related industries for classification, packaging, testing, processing, assembly, etching, cleaning and other instrument use or pneumatic equipment instrument control and drive; if the air supply source contains moisture and fine particles , the precision products in the process will be polluted, or the clean room environment will be affected.
CDA air compressor system is a set of drive system, including air compressor, air storage tank, dryer and filter… etc.
ISO 8573 targets the important indicators in CDA that will affect the process yield as follows:
• Analysis of heavy metal elements
• Oil content (total hydrocarbons) analysis
• Particle number analysis (0.1um ~10um)
• Acid-base gas content analysis (anions and cations)
• Moisture and dew point analysis
• Analysis of other organic pollutants
• CO / CO2 / NOx / SOx / H2S content analysis
• Filtration efficiency evaluation
After the air passes through the air compressor, it will contain condensed moisture and particulate dust. In order to provide a clean and dry air source for the precise process, an air compressor must be equipped with a drying system. The drying system mainly removes the moisture in the compressed air by adsorption, and use external energy to remove the moisture in the adsorbent material in the dryer, use the zero air consumption automatic drain to discharge the condensed water, and finally install three air filters (oil mist separators) with different filtration degrees at the air outlet. In addition to the impurity particles in the air, it is in line with the environmental control of the clean room.
Model/Assembly Accessories:
• Q-AIR750D silent cabin type oil-free air compressor (including dryer). The maximum pressure can reach 8kg/cm2, the open flow rate is 775LPM, and the dew point temperature is -5°C.
• Auto drain utilizes magnetic force to operate a zero air loss auto drain to remove air compressors, air filters, dryers and condensate from all types of drain.
• 300L air reservoir for long-term air supply.
• VF-D CAF filter 4000L/min, air filter (oil mist separator) (0.3u), air filter (oil mist separator) (0.01u)
Suitable industries:
Semiconductor process, photoelectric panel process, electronic process, biochemical and pharmaceutical process, laboratory, biotechnology factory, and food industry.